An ESD, TPD, SIMS study of the interaction of trimethylsilane with silicon(100)

Martin Vincent Ascherl, University of Texas at El Paso

Abstract

Abstract not available

Subject Area

Materials science

Recommended Citation

Ascherl, Martin Vincent, "An ESD, TPD, SIMS study of the interaction of trimethylsilane with silicon(100)" (1994). ETD Collection for University of Texas, El Paso. AAIEP04585.
https://scholarworks.utep.edu/dissertations/AAIEP04585

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