An ESD, TPD, SIMS study of the interaction of trimethylsilane with Si(100)

Martin Vincent Ascherl, University of Texas at El Paso

Subject Area

Engineering, Materials Science

Recommended Citation

Ascherl, Martin Vincent, "An ESD, TPD, SIMS study of the interaction of trimethylsilane with Si(100)" (1994). ETD Collection for University of Texas, El Paso. AAIEP04585.
http://digitalcommons.utep.edu/dissertations/AAIEP04585

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