A TPD, LEED, and AES study of the interaction of disilane and trimethylsilane with Si(100)

Manuel Alvarado, University of Texas at El Paso

Subject Area

Engineering, Materials Science

Recommended Citation

Alvarado, Manuel, "A TPD, LEED, and AES study of the interaction of disilane and trimethylsilane with Si(100)" (1997). ETD Collection for University of Texas, El Paso. AAIEP05009.
http://digitalcommons.utep.edu/dissertations/AAIEP05009

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