Comparative evaluation of silicon nitride deposited by sputtering and ECR-PECVD for ACTFEL display devices

Rebecca Teresa Cardenas, University of Texas at El Paso

Subject Area

Engineering, Materials Science

Recommended Citation

Cardenas, Rebecca Teresa, "Comparative evaluation of silicon nitride deposited by sputtering and ECR-PECVD for ACTFEL display devices" (1997). ETD Collection for University of Texas, El Paso. AAIEP05076.
http://digitalcommons.utep.edu/dissertations/AAIEP05076

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