A TPD, LEED, and AES study of the interaction of disilane and trimethylsilane with silicon(100)

Manuel Alvarado, University of Texas at El Paso

Abstract

Abstract not available

Subject Area

Materials science

Recommended Citation

Alvarado, Manuel, "A TPD, LEED, and AES study of the interaction of disilane and trimethylsilane with silicon(100)" (1997). ETD Collection for University of Texas, El Paso. AAIEP05009.
https://scholarworks.utep.edu/dissertations/AAIEP05009

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